Date of Award
Mustafa Guvench PhD
A micro-electromechanical systems (MEMS) device contain both electrical and mechanical components that are in many common consumer products. Thermal micro actuators are standard components in micro systems and they are powered electrically. The thermal micro actuator shown below consist of material with different coefficients of thermal expansion. When the temperature of the micro actuator goes up due electrical power, the micro actuator changes shape due to difference in the expansion associated with temperature change.
Parikh, Shilen, "Testing of Thermally Actuated Rotational MEMS Mirror" (2018). Thinking Matters Symposium. 163.