Date
Spring 2018
Document Type
Poster Session
Department
Engineering
Advisor
Mustafa Guvench PhD
Abstract
A micro-electromechanical systems (MEMS) device contain both electrical and mechanical components that are in many common consumer products. Thermal micro actuators are standard components in micro systems and they are powered electrically. The thermal micro actuator shown below consist of material with different coefficients of thermal expansion. When the temperature of the micro actuator goes up due electrical power, the micro actuator changes shape due to difference in the expansion associated with temperature change.
Start Date
April 2018
Recommended Citation
Parikh, Shilen, "Testing of Thermally Actuated Rotational MEMS Mirror" (2018). Thinking Matters Symposium Archive. 163.
https://digitalcommons.usm.maine.edu/thinking_matters/163
