Start Date

8-5-2020 12:00 AM

Document Type

Poster Session

Department

Engineering

Advisor

Mustafa Guvench, PhD

Abstract

The challenging issue in MEMS (Micro Electro-Mechanical Systems) technology development and commercialization is justifying its reliability. Integrating multiple devices on the same chip must handle more failure modes. Some causes for device failures are frequency shifts, wrong modes, structural defects, and lack of reliability. This project focuses on redesign of piezoelectric energy harvesters using Finite Elements Analysis (FEA) tools: ANSYS and SolidWorks. The harvesters were designed in SolidWorks and simulated in ANSYS. The simulation revealed the following first 3 mode resonant frequencies: 214, 298 and 357 Hz for the first, second and third harvesters, respectively. The maximum equivalent stresses were 8.063, 4.694 and 5.015 Mpa, respectively. After the redesign in SolidWorks, simulation in ANSYS, the harvesters were designed in L-Edit, the software utilized for designs to be sent to MEMSCAP for fabrication.

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May 8th, 12:00 AM

Design and Redesign of MEMS Piezoelectric Energy Harvesters

The challenging issue in MEMS (Micro Electro-Mechanical Systems) technology development and commercialization is justifying its reliability. Integrating multiple devices on the same chip must handle more failure modes. Some causes for device failures are frequency shifts, wrong modes, structural defects, and lack of reliability. This project focuses on redesign of piezoelectric energy harvesters using Finite Elements Analysis (FEA) tools: ANSYS and SolidWorks. The harvesters were designed in SolidWorks and simulated in ANSYS. The simulation revealed the following first 3 mode resonant frequencies: 214, 298 and 357 Hz for the first, second and third harvesters, respectively. The maximum equivalent stresses were 8.063, 4.694 and 5.015 Mpa, respectively. After the redesign in SolidWorks, simulation in ANSYS, the harvesters were designed in L-Edit, the software utilized for designs to be sent to MEMSCAP for fabrication.

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