Date
Spring 2017
Document Type
Poster Session
Department
Engineering
Advisor
Dr. Mustafa Guvench
Abstract
The purpose of this project was to use COMSOL, an advanced FEM (finite element modeling) software, to analyze a Coupled Thermal Resonator. This Coupled Thermal Resonator was previously constructed in L-Edit, but when analyzed in COMSOL, it produced undesirable results. This project focused on improving the design and model of the Resonator to improve simulation results and evaluating the actual response of the MEMS device to determine if simulated results were accurate for the actual device. Many different factors may have contributed to producing the double peak seen in the simulation, including the weak coupling between the two resonators. These factors were analyzed to determine how to correct the model or simulation parameters to produce the expected and desired results. Simulation of the actual DC heating of the device, which was previously determined to be too complex, was attempted in an effort to produce a fully-simulated model of the actuator. Also, measurement of actual fabricated MEMS resonator frequency response was measured and compared with the simulated results.
Start Date
April 2017
Recommended Citation
Wiswell, Joshua, "Design verification of MEMS Resonators with FEM Simulator" (2017). Thinking Matters Symposium Archive. 87.
https://digitalcommons.usm.maine.edu/thinking_matters/87
Included in
Electrical and Electronics Commons, Electronic Devices and Semiconductor Manufacturing Commons
